Company Filing History:
2 out of 4,804 
1 out of 75 
1 out of 1 Years Active: 2005-2025
Title: Karla Hiller: Innovator in MEMS Technology
Introduction
Karla Hiller is a prominent inventor based in Loessnitz, Germany. She has made significant contributions to the field of microelectromechanical systems (MEMS) with her innovative patents. With a total of 3 patents, Hiller has established herself as a key figure in the development of advanced sensor technologies.
Latest Patents
One of Hiller's latest patents is a MEMS vacuum sensor based on the friction principle. This invention relates to a sensor element designed for pressure measurement, featuring a substrate and at least one mass element. The mass element is arranged to oscillate relative to the substrate, creating a gap that can be varied through its oscillations. This design includes recesses in the substrate to reduce damping effects, allowing for precise pressure measurements in the vacuum range, with capabilities to record pressures as low as 10 mbar and up to atmospheric pressure.
Another notable patent is a method for producing a silicon torsion spring. This method is particularly useful for reading rotation rates in microstructured systems. The process involves using a wafer or wafer composite, where a V-shaped cross-section spring is formed through anisotropic wet-chemical etching. The resulting structure achieves low torsional stiffness while maintaining high stiffness in lateral and vertical directions.
Career Highlights
Throughout her career, Karla Hiller has worked with notable organizations such as Litef GmbH and Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V. Her experience in these companies has contributed to her expertise in MEMS technology and sensor development.
Collaborations
Karla has collaborated with several professionals in her field, including Maik Wiemer and Detlef Billep. These collaborations have further enhanced her innovative work and contributed to the advancement of MEMS technologies.
Conclusion
Karla Hiller is a distinguished inventor whose work in MEMS technology has led to significant advancements in pressure measurement and sensor design. Her innovative patents and career achievements highlight her contributions to the field and her commitment to pushing the boundaries of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.