Company Filing History:
Years Active: 2005
Title: The Innovations of Karl-Hein Schuster: A Pioneer in Microlithography
Introduction: Karl-Hein Schuster, hailing from Königsbronn, Germany, is an innovative inventor with a significant contribution in the field of microlithography. With a singular patent to his name, Schuster has marked his presence in the realm of advanced illumination systems.
Latest Patents: Karl-Hein Schuster's notable invention is an illumination system particularly designed for microlithography. This groundbreaking patent involves a projection exposure apparatus that utilizes a wavelength of 193 nm or less. The system consists of a primary light source, an illumination system with an image plane, multiple raster elements that capture light from the primary source, and a field mirror that organizes this light into an arc-shaped field with several field points in the image plane. The design further includes a projection objective, with several principle rays running divergently into the projection objective, enhancing the efficiency and precision of microlithography processes.
Career Highlights: Schuster works for Carl Zeiss Semiconductor, a renowned company in the optical and semiconductor industries. His role at the company emphasizes the integration of innovative methodologies to improve semiconductor production processes through precise light management and imaging.
Collaborations: Throughout his professional journey, Karl-Hein Schuster has collaborated with notable coworkers, including Jörg Schultz and Johannes Wangler. These collaborations have likely contributed to the vibrant exchange of ideas that foster innovation within their projects.
Conclusion: Karl-Hein Schuster's work in developing an advanced illumination system for microlithography represents a pivotal contribution to the field, showcasing the importance of precision in semiconductor technology. His innovative spirit and collaborative efforts with colleagues highlight the dynamism associated with research and development in high-tech industries.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.