Karey L Holland

Title: The Innovative Contributions of Karey L Holland

Introduction

Karey L Holland is a prominent inventor based in Essex Junction, Vermont. She has made significant contributions to the field of technology, particularly in the area of metal etching processes. With a total of 3 patents to her name, her work has had a substantial impact on the industry.

Latest Patents

One of her latest patents is titled "Etching Metal Films with Complexing Chloride Plasma." This innovative method allows for dry etching of metals that form low volatility chlorides. The process involves controllably introducing Z-Cl reaction products into a conventional Cl-based plasma, independent of the workpiece. The Z-Cl products, such as AlCl₃ and GaCl₃, exhibit both electron acceptor and chloride donor properties. This allows for the controllable complexing of metals like cobalt, copper, and nickel, which typically produce low volatility chlorides, to form high volatility ZₓClᵧM𝓏 reaction products.

Another notable patent is the "Anisotropic Etch Process for Tungsten Metallurgy." This method focuses on anisotropically etching a thick tungsten layer atop a thin underlayer of titanium nitride. By exposing the material to a gaseous plasma comprised of a binary mixture of chlorine gas and oxygen, with oxygen making up approximately 25%-45% of the mixture by volume, this process achieves a high tungsten etch rate, uniform etching, anisotropic profiles, and a high etch rate ratio to underlying glass passivation layers.

Career Highlights

Karey L Holland is currently employed at International Business Machines Corporation (IBM), where she continues to innovate and develop new technologies. Her work at IBM has positioned her as a leader in her field, contributing to advancements in semiconductor manufacturing and materials science.

Collaborations

Throughout her career, Karey has collaborated with notable colleagues, including William J Cote and Terrance M Wright. These collaborations have further enhanced her research and development efforts, leading to groundbreaking innovations in her area of expertise.

Conclusion

Karey L Holland's contributions to the field of technology through her patents and work at IBM exemplify her dedication to innovation. Her advancements in metal etching processes are paving the way for future developments in the industry.