Karen A Grim

Title: The Innovative Contributions of Karen A Grim

Introduction

Karen A Grim is a notable inventor based in Reading, PA (US). She has made significant contributions to the field of semiconductor technology, particularly through her innovative patent related to the rapid thermal annealing of implanted semiconductors. Her work has implications for the fabrication of advanced semiconductor devices, which are essential in various electronic applications.

Latest Patents

Karen A Grim holds a patent for a "Procedure for rapid thermal annealing of implanted semiconductors." This invention focuses on the fabrication of semiconductor devices, especially those utilizing III-V and II-VI compound semiconductor materials. The process involves Rapid Thermal Annealing (RTA) of semiconductor wafers that have been implanted with dopants. The invention also includes a black-box implement used in conjunction with the RTA. The method encompasses several steps: a pre-anneal step to reduce thermal shock, a main annealing step to remove damage caused by dopant implantation, and a post-anneal step to relieve stresses from the main annealing process. The combined use of RTA and the black box results in wafers that are substantially free of slip lines and exhibit high mobilities and uniform activation.

Career Highlights

Karen A Grim has had a distinguished career at AT&T Bell Laboratories, where she has contributed to various projects in semiconductor technology. Her expertise in the field has led to advancements that enhance the performance and reliability of semiconductor devices.

Collaborations

Throughout her career, Karen has collaborated with esteemed colleagues, including Shobha Singh and LeGrand G Van Uitert. These collaborations have fostered an environment of innovation and have contributed to the success of her projects.

Conclusion

Karen A Grim's contributions to semiconductor technology through her innovative patent demonstrate her significant impact on the field. Her work continues to influence the development of advanced electronic devices, showcasing the importance of innovation in technology.