Kaoru Kanda

Title: Kaoru Kanda: Innovator in Photoresist Baking Technology

Introduction

Kaoru Kanda is a notable inventor based in Yokohama, Japan. He has made significant contributions to the field of photoresist technology, holding a total of 5 patents. His work primarily focuses on methods and apparatuses for baking photoresist applied on substrates, which are crucial in the semiconductor manufacturing process.

Latest Patents

Kanda's latest patents include innovative methods for baking photoresist applied on substrates. One of his patents describes a photomask substrate that is formed in a rectangular shape, with photoresist applied on its surface. This substrate is positioned above a lower heating plate, separated by a proximity distance. The lower heating plate features a heat unifying ring that surrounds the photomask substrate, with a taper section designed at a predetermined angle. Additionally, an upper heating plate is arranged above the lower heating plate, providing a baking chamber that shields the baking process from external influences.

Career Highlights

Throughout his career, Kaoru Kanda has worked with prominent companies such as Kabushiki Kaisha Toshiba and Sigma Corporation. His experience in these organizations has allowed him to refine his expertise in photoresist technology and contribute to advancements in the field.

Collaborations

Kanda has collaborated with notable colleagues, including Katsuhisa Mita and Yasuo Matsuoka. These partnerships have further enriched his work and innovation in the industry.

Conclusion

Kaoru Kanda's contributions to photoresist baking technology have established him as a key figure in the field. His innovative patents and collaborations reflect his commitment to advancing semiconductor manufacturing processes.