This inventor holds 1 USPTO granted patent. Top assignee: Ulvac, Inc.. Active years: 2022.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2022
Title: Kanji Yaginuma: Innovator in Sputtering Technology
Introduction
Kanji Yaginuma is a notable inventor based in Kanagawa, Japan. He has made significant contributions to the field of sputtering technology, particularly through his innovative patent for a sputtering apparatus. His work has implications for various applications in thin film deposition.
Latest Patents
Yaginuma holds a patent for a sputtering apparatus that features a vacuum chamber containing a target. This apparatus allows for the rotation of a circular substrate at a predetermined speed while the target is sputtered to form a thin film on the substrate's surface. The design includes a stage that rotatably holds the substrate, offset from the target's center, and a shielding plate that permits the passage of sputtered particles through an opening that gradually increases in area.
Career Highlights
Kanji Yaginuma is associated with Ulvac, Inc., a company known for its advanced vacuum technology and equipment. His work at Ulvac has positioned him as a key player in the development of innovative sputtering solutions.
Collaborations
Yaginuma collaborates with Katsuaki Nakano, contributing to advancements in sputtering technology and enhancing the capabilities of their apparatus.
Conclusion
Kanji Yaginuma's contributions to sputtering technology through his innovative patent demonstrate his expertise and commitment to advancing the field. His work continues to influence the development of thin film deposition techniques.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile