Kangsub Yim

Title: Kangsub Yim: Innovator in Dielectric Material Technologies

Introduction

Kangsub Yim is a notable inventor based in Mountain View, CA (US). He has made significant contributions to the field of dielectric materials, particularly in damascene applications. With a total of 2 patents, his work has advanced the technology used in semiconductor manufacturing.

Latest Patents

Kangsub Yim's latest patents include innovative methods for depositing dielectric materials. One of his patents focuses on a method of depositing dielectric materials that includes oxygen-doped silicon carbide. This method provides a way to deposit an oxygen-doped dielectric layer that can serve as a barrier layer or hardmask. The process involves positioning a substrate in a processing chamber and introducing a processing gas that contains an oxygen-containing organosilicon compound and an oxygen-free organosilicon compound. The resulting dielectric material has an oxygen content of about 15 atomic percent or less, making it suitable for damascene or dual damascene applications.

Career Highlights

Kangsub Yim is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has allowed him to focus on developing advanced materials and processes that enhance semiconductor fabrication.

Collaborations

Throughout his career, Kangsub has collaborated with several talented individuals, including Ju-Hyung Lee and Ping Xu. These collaborations have contributed to the successful development of his patented technologies.

Conclusion

Kangsub Yim's contributions to the field of dielectric materials have positioned him as an influential inventor in the semiconductor industry. His innovative methods continue to impact the way materials are utilized in advanced manufacturing processes.