Kang Nan Khor

Title: Kang Nan Khor: Innovator in Semiconductor Technology

Introduction

Kang Nan Khor is a notable inventor based in Nibong Tebal, Malaysia. He has made significant contributions to the field of semiconductor technology, particularly through his innovative methods in manufacturing trench oxides.

Latest Patents

Khor holds a patent for a method of manufacturing a trench oxide in a trench for a gate structure in a semiconductor substrate. This patent describes a comprehensive process that includes generating a trench in the semiconductor substrate, creating an oxide layer over the opposing sidewalls of the trench, and employing ion implantation to damage a portion of the oxide layer. The method further involves coating the oxide layer with an etching mask, generating openings in the mask, and removing the oxide layer by etching it down to a specific depth.

Career Highlights

Kang Nan Khor is currently associated with Infineon Technologies AG, a leading company in semiconductor solutions. His work has been instrumental in advancing the manufacturing processes within the industry. Khor's innovative approach has led to the development of efficient techniques that enhance the performance of semiconductor devices.

Collaborations

Khor has collaborated with esteemed colleagues such as Moriz Jelinek and Armin Schieber. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Kang Nan Khor's contributions to semiconductor technology through his patent and work at Infineon Technologies AG highlight his role as an influential inventor in the field. His innovative methods continue to shape the future of semiconductor manufacturing.