Company Filing History:
Years Active: 2020
Title: Kana Komori: Innovator in Substrate Cleaning Technologies
Introduction
Kana Komori is a notable inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate cleaning technologies, holding a total of 2 patents. His innovative approaches have the potential to enhance the efficiency and effectiveness of substrate processing.
Latest Patents
Kana Komori's latest patents include a substrate cleaning method and a device for creating a substrate cleaning recipe. The substrate cleaning method provides a solution for cleaning substrates with an oxide film on their surface. This method involves a partial etching step to etch the oxide film to a predetermined thickness, followed by a physical cleaning step to remove particles from the surface. The physical cleaning effectively targets particles exposed from the natural oxide film while preserving the film itself. Additionally, his substrate processing apparatus utilizes a low-surface-tension liquid to form a liquid film on the substrate, enhancing the cleaning process through controlled gas supply and substrate rotation.
Career Highlights
Kana Komori is currently employed at Screen Holdings Co., Ltd., where he continues to develop innovative solutions in substrate processing. His work has positioned him as a key figure in advancing cleaning technologies within the industry.
Collaborations
Kana collaborates with talented coworkers, including Ayumi Higuchi and Hiroaki Takahashi. Their combined expertise contributes to the success of their projects and the advancement of substrate cleaning technologies.
Conclusion
Kana Komori's contributions to substrate cleaning methods and devices reflect his commitment to innovation in the field. His patents demonstrate a deep understanding of the challenges in substrate processing and offer practical solutions to enhance efficiency.