Location History:
- Itami, JP (1988 - 1993)
- Hyogo, JP (1989 - 1996)
Company Filing History:
Years Active: 1988-1996
Title: Innovations of Junichi Arima in Semiconductor Technology
Introduction
Junichi Arima is a prominent inventor based in Itami, Japan, known for his significant contributions to semiconductor technology. With a total of 10 patents, Arima has made remarkable advancements in the field, particularly in the design and structure of semiconductor integrated circuits.
Latest Patents
Arima's latest patents include innovative methods for improving interconnection structures in semiconductor devices. One of his notable inventions involves a surface treatment of a first aluminum interconnection layer exposed to a plasma of oxygen or fluorine-containing gas. This process aims to remove a thin deterioration layer formed during the connection hole's creation, utilizing sputter etching with argon ions. Additionally, he has developed a semiconductor integrated circuit device featuring multilayer aluminum interconnection layers connected through a connection hole. This design enhances electrical contact resistance and improves resistance against electron-migration and stress-migration.
Career Highlights
Junichi Arima is associated with Mitsubishi Denki Kabushiki Kaisha, where he has played a crucial role in advancing semiconductor technologies. His work has been instrumental in developing more efficient and reliable interconnection structures, which are vital for modern electronic devices.
Collaborations
Arima has collaborated with notable colleagues, including Shigeru Harada and Yoshihiro Hirata, contributing to various projects that push the boundaries of semiconductor innovation.
Conclusion
Junichi Arima's contributions to semiconductor technology through his patents and collaborations have significantly impacted the industry. His innovative approaches continue to shape the future of electronic devices and integrated circuits.