Company Filing History:
Years Active: 1998
Title: Junich Honma: Innovator in Ceramic Electrostatic Technology
Introduction
Junich Honma is a prominent inventor based in Tokyo, Japan. He is known for his significant contributions to the field of electrostatic technology, particularly in the development of ceramic electrostatic chucks. His innovative work has implications for various applications, including semiconductor manufacturing.
Latest Patents
Honma holds a patent for a ceramic electrostatic chuck and method. This invention involves an electrostatic chuck designed to clamp a working member, such as a semiconductor wafer, securely to the chuck. The electrostatic chuck features at least one conductive electrode and an insulating layer that separates the electrode from the working member. The insulating layer is composed of a composition containing pyrolytic boron nitride (PBN) and a carbon dopant, ensuring its electrical resistivity is less than 1014 Ω-cm. By applying a voltage across the conductive electrode, an electrostatic field is generated, effectively clamping the working member to the chuck.
Career Highlights
Junich Honma is associated with Advanced Ceramics Corporation, where he continues to innovate in the field of ceramics and electrostatic technology. His work has been instrumental in advancing the capabilities of electrostatic chucks used in semiconductor processing.
Collaborations
Honma has collaborated with notable colleagues, including Kotaro Mino and Hisayuki Miyata. Their combined expertise has contributed to the development of advanced technologies in their field.
Conclusion
Junich Honma's contributions to ceramic electrostatic technology highlight his role as an influential inventor. His patent for the ceramic electrostatic chuck demonstrates his commitment to innovation in semiconductor manufacturing.