Jungwan Sung

Title: Jungwan Sung: Innovator in Refractory Metal Technologies

Introduction

Jungwan Sung is a notable inventor based in Santa Clara, CA, who has made significant contributions to the field of materials science. He holds three patents that focus on advanced methods for enhancing the performance of refractory metals and their applications in semiconductor technology.

Latest Patents

One of his latest patents is titled "Selective refractory metal and nitride capping." This invention describes a method for creating a refractory metal and refractory metal nitride cap that effectively reduces copper electromigration and copper diffusion. The method involves depositing a refractory metal nucleation layer and nitriding at least the upper portion of the refractory metal layer to form a refractory metal nitride. Additionally, the patent outlines methods to reduce and clean copper lines before refractory metal deposition, as well as techniques for forming a thicker refractory metal layer using bulk deposition.

Another significant patent by Jungwan Sung is "ALD of tantalum using a hydride reducing agent." This atomic layer deposition (ALD) method allows for the deposition of conformal tantalum-containing material layers on small features of a substrate surface. The process includes depositing a thin conformal layer of tantalum-containing precursor, purging halogen byproducts and unused reactants, and reducing the precursor to achieve a conformal layer of tantalum or tantalum-containing material. The method can be repeated until the desired layer thickness is achieved, with an optional step to treat the newly formed surface with a nitrogen-containing agent to create varying amounts of tantalum nitride.

Career Highlights

Jungwan Sung is currently employed at Novellus Systems Incorporated, where he continues to innovate in the field of semiconductor materials. His work has been instrumental in advancing technologies that improve the reliability and efficiency of electronic devices.

Collaborations

Throughout his career, Jungwan has collaborated with notable colleagues, including James A Fair and Nerissa Taylor. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Jungwan Sung's contributions to refractory metal technologies and his innovative patents highlight his role as a leading inventor in the semiconductor field. His work continues to influence advancements in materials science and electronic device performance.