Jung-Hoon Byun

Title: Innovations of Jung-Hoon Byun in Semiconductor Fabrication

Introduction

Jung-Hoon Byun is a notable inventor based in Yongin, South Korea. He has made significant contributions to the field of semiconductor fabrication, holding 2 patents that focus on innovative monitoring techniques.

Latest Patents

His latest patents include methods for monitoring semiconductor fabrication processes using polarized light. The inventive concept provides apparatuses and methods for monitoring these processes in real time using polarized light. In some embodiments, the apparatus comprises a light source configured to generate light, a beam splitter configured to reflect the light toward the wafer being processed, an objective polarizer configured to polarize the light reflected toward the wafer and to allow light reflected by the wafer to pass therethrough, a blaze grating configured to separate light reflected by the wafer according to wavelength, an array detector configured to detect the separated light, and an analyzer to analyze the three-dimensional profile of the structure or pattern being formed in the wafer.

Career Highlights

Jung-Hoon Byun is currently employed at Samsung Electronics Co., Ltd., where he continues to develop innovative solutions in semiconductor technology. His work has been instrumental in enhancing the efficiency and accuracy of semiconductor fabrication processes.

Collaborations

He has collaborated with notable coworkers such as Deok-Yong Kim and Woong-Kyu Son, contributing to advancements in their shared field of expertise.

Conclusion

Jung-Hoon Byun's contributions to semiconductor fabrication through his innovative patents highlight his role as a key inventor in the industry. His work continues to influence the development of advanced monitoring techniques in semiconductor processes.