This inventor holds 1 USPTO granted patent. Top assignee: Kla Tencor Corporation. Active years: 2014.
Company Filing History:
Years Active: 2014
Title: Jun-Jie Ye: Innovator in High Throughput Thin Film Characterization
Introduction
Jun-Jie Ye is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of semiconductor manufacturing through his innovative patent. His work focuses on enhancing the efficiency and accuracy of thin film characterization and defect detection.
Latest Patents
Jun-Jie Ye holds a patent for "High throughput thin film characterization and defect detection." This patent presents methods and systems for determining band structure characteristics of high-k dielectric films deposited over a substrate based on spectral response data. High throughput spectrometers are utilized to quickly measure semiconductor wafers early in the manufacturing process. Optical dispersion metrics are determined based on the spectral data. Band structure characteristics such as band gap, band edge, and defects are determined based on optical dispersion metric values. In some embodiments, a band structure characteristic is determined by curve fitting and interpolation of dispersion metric values. In other embodiments, band structure characteristics are determined by regression of a selected dispersion model. Additionally, band structure characteristics indicative of band broadening of high-k dielectric films are also determined. The electrical performance of finished wafers is estimated based on the band structure characteristics identified early in the manufacturing process.
Career Highlights
Jun-Jie Ye is currently associated with Kla Tencor Corporation, where he applies his expertise in semiconductor technology. His innovative approaches have contributed to advancements in the manufacturing processes of semiconductor wafers.
Collaborations
He has collaborated with notable colleagues, including Philip D Flanner, III and Xiang Gao. Their combined efforts in research and development have furthered the understanding and application of thin film technologies.
Conclusion
Jun-Jie Ye's contributions to high throughput thin film characterization and defect detection have positioned him as a key figure in semiconductor innovation. His work continues to influence the industry and improve manufacturing processes.