Jui-Lin Lu

Title: Innovations of Jui-Lin Lu in Flash Memory Technology

Introduction

Jui-Lin Lu is a prominent inventor based in Hsinchu, Taiwan, known for his significant contributions to the field of flash memory technology. With a total of six patents to his name, Lu has developed innovative methods that enhance the efficiency and functionality of flash memory devices.

Latest Patents

Among his latest patents, Lu has developed a method of fabricating flash memory. This method involves the sequential formation of a tunneling dielectric layer, a first conductive layer, and a mask layer on a substrate to create a gate structure. Buried source and drain regions are formed in the substrate, and the strips are patterned into floating gate structures. An insulation layer is then formed adjacent to the gate structure, with its top surface lower than that of the first conductive layer. The mask layer is removed, and an additional conductive layer is formed to extend over the adjacent insulation layer, creating a floating gate. A gate dielectric layer is subsequently formed on the floating gate, followed by the formation of a control gate on the gate dielectric layer.

Another notable patent is the method for fabricating a flash memory device that features a self-aligned contact. This invention describes a flash memory device that includes a self-aligned contact opening and the method of its fabrication. After forming the control gate, a spacer is created over the sidewall of the gate layer, followed by the application of another dielectric layer to cover the control gate. The dielectric layers are then patterned to form a self-aligned contact opening between neighboring control gates, exposing a bit line in the substrate. A conductive material is used to fill the self-aligned contact opening.

Career Highlights

Jui-Lin Lu is currently employed at Macronix International Co., Ltd., where he continues to innovate in the field of memory technology. His work has significantly impacted the development of advanced flash memory solutions.

Collaborations

Lu collaborates with talented individuals such as Chong-Jen Huang and Kuang-Chao Chen, contributing to a dynamic and innovative work environment.

Conclusion

Jui-Lin Lu's contributions to flash memory technology through his patents and collaborative efforts highlight his role as a leading inventor in the field. His innovative methods continue to shape the future of memory devices.