Company Filing History:
Years Active: 2023
Title: Innovator Spotlight: Jui Chieh Chen and His Contribution to Photolithography
Introduction: Jui Chieh Chen is a notable inventor based in Hsinchu, Taiwan, recognized for his innovative contributions in the field of photolithography. With a singular patent to his name, Chen's work addresses critical challenges in semiconductor manufacturing.
Latest Patents: Chen holds a patent for "Methods and systems for reducing particulate deposition on photomask." This invention is particularly significant as it tackles the particulate deposition rate on photolithographic masks, specifically focusing on tin (Sn) particles generated within an Extreme Ultraviolet (EUV) light source. The core of his invention lies in producing turbulence within the radiation source chamber of the EUV light source. By adjusting temperature, pressure, and gas flow rate, Chen's approach reduces the number of particles that exit the EUV light source, minimizing potential deposition on the photomask.
Career Highlights: Jui Chieh Chen is employed at Taiwan Semiconductor Manufacturing Company Ltd., where he plays a crucial role in advancing semiconductor technology. His expertise in photolithography and materials science contributes significantly to the company’s cutting-edge manufacturing processes.
Collaborations: Throughout his career, Chen has collaborated closely with Yi-Wei Lee, a talented colleague who shares his passion for innovation in semiconductor development. Their combined efforts within the research team have proven essential for enhancing processes that directly impact product quality and efficiency.
Conclusion: Jui Chieh Chen's innovative methods for reducing particulate deposition represent a vital advancement in the field of semiconductor manufacturing. With his significant contributions alongside collaborative efforts within Taiwan Semiconductor Manufacturing Company Ltd., Chen embodies the spirit of innovation that drives the industry forward. His work is a testament to the importance of developing novel solutions to meet the challenges of modern technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.