Juergen Preuninger

Title: Juergen Preuninger: Innovator in Semiconductor Technology

Introduction

Juergen Preuninger is a notable inventor based in Munich, Germany. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to design and functionality.

Latest Patents

One of his latest patents is titled "Layout impact reduction with angled phase shapes." This invention involves a phase shift mask shape that reduces line-end shortening at critical features without necessitating layout size increases. The design incorporates an angled extension that accounts for lithographic shortening values, allowing for a more precise alignment with the reference layer. This innovation enables the critical shape to be designed closer to the reference layer than previously possible.

Another significant patent is the "Method of reducing pitch on semiconductor wafer." This method involves projecting an image during the material substrate process. A photolithographic mask is illuminated with coherent light at an oblique angle, which includes a phase shifting region. The design ensures that a focused image is projected onto the material substrate, achieving a periodicity of P/2, thus enhancing the efficiency of the semiconductor manufacturing process.

Career Highlights

Juergen Preuninger has worked with prominent companies in the technology sector, including Infineon Technologies AG and IBM. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Throughout his career, Juergen has collaborated with esteemed colleagues such as Gerhard Kunkel and Shahid Ahmad Butt. These partnerships have fostered an environment of innovation and creativity, leading to the development of impactful technologies.

Conclusion

Juergen Preuninger's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in the industry, showcasing the importance of innovation in technology.