Juda L Shohet

Title: Innovations of Juda L Shohet

Introduction

Juda L Shohet is a notable inventor based in Madison, WI (US), recognized for his contributions to the field of micromachining and plasma ion implantation. With a total of four patents to his name, he has made significant advancements in technology that enhance the characterization of liquids and the purification of ions in semiconductor processes.

Latest Patents

One of his latest patents is a micromachined probe apparatus and methods for making and using it to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate. This innovative probe apparatus features an integrated scanning tip and a dither actuation mechanism, utilizing a bent-beam electrothermal actuator. The design includes an insulation gap that separates the probe tip from the actuator, ensuring effective operation. The device is fabricated using a modified micro electro-discharge machining process, which allows for electrical isolation within the micromachined structure through an epoxy plug. This apparatus is particularly useful for measuring changes in the external surface potential of a microfluidic channel as the pH of the liquid varies, and it can also map embedded charge in thin layers on substrates, making it valuable for monitoring microelectronics manufacturing processes.

Another significant patent involves ion purification for plasma ion implantation. This process is conducted within an evacuated chamber where a target, such as a semiconductor wafer, is supported on a target stage. High voltage pulses are applied to the target to implant ions from a plasma. The plasma is purified by passing it through an ion cyclotron resonance system, which includes excitation and ion collector electrodes. A unidirectional magnetic field is applied to facilitate the purification process. The purified plasma is then directed to the implantation region, where desired ions are implanted into the target.

Career Highlights

Juda L Shohet has worked with prominent organizations such as the Wisconsin Alumni Research Foundation and Nicolet Instrument Corporation. His experience in these companies has contributed to his expertise in the field of innovations related to micromachining and plasma technology.

Collaborations

Throughout his career, he has collaborated with notable individuals, including Sahba Ghaderi and Duane P Littlejohn. These collaborations have likely enriched his work and led to further advancements in his inventions.

Conclusion

Juda L Shohet's contributions to the fields of micromachining and plasma ion implantation demonstrate his innovative spirit and