Ju Yong Jang

Title: Ju Yong Jang: Innovator in Substrate Treatment Technology

Introduction

Ju Yong Jang is a notable inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of substrate treatment technology, holding a total of 3 patents. His work focuses on developing innovative apparatuses that enhance the quality and efficiency of substrate processing.

Latest Patents

One of Ju Yong Jang's latest patents is an "Apparatus for treating substrate." This inventive concept provides a substrate treating apparatus that includes a housing with a treating space for processing a substrate. The apparatus features a support unit positioned within the treating space and a plasma source that generates plasma by exciting a gas supplied to the treating space. The support unit consists of a first plate where the substrate is positioned on the top side, a second plate located at the bottom side of the first plate, and an adhesive layer that adheres the two plates together. Notably, the top surface of the second plate is divided into a central region and an edge region, with a significant difference in the height of the adhesive layer between these regions.

Another significant patent is the "Apparatus and method for inspecting electrostatic chuck." This invention provides a non-destructive method for inspecting the quality of an electrostatic chuck. The apparatus includes a measurement unit that measures the first capacitance of a dielectric layer and the second capacitance of an electrode within the dielectric layer. A control unit evaluates the quality of the electrode based on these capacitance measurements.

Career Highlights

Ju Yong Jang is currently employed at Semes Co., Ltd., where he continues to innovate in the field of substrate treatment technologies. His work has been instrumental in advancing the capabilities of substrate processing equipment.

Collaborations

Ju Yong Jang has collaborated with notable colleagues, including Su Hyung Lee and Sung Ho Lee. Their combined expertise contributes to the innovative projects at Semes Co., Ltd.

Conclusion

Ju Yong Jang is a prominent inventor whose work in substrate treatment technology has led to significant advancements in the field. His patents reflect a commitment to innovation and quality in substrate processing.