Ju Hyun Oh

Title: Innovations by Ju Hyun Oh: Advancements in Semiconductor Manufacturing

Introduction

Ju Hyun Oh, an accomplished inventor based in San Jose, CA, has significantly contributed to the field of semiconductor manufacturing. With a total of two patents to his name, Oh's work focuses on innovative methods that enhance the performance and efficiency of semiconductor structures.

Latest Patents

Ju Hyun Oh's most recent patents include:

1. **Metal oxide preclean for bottom-up gapfill in MEOL and BEOL** - This patent outlines a novel method of pre-cleaning semiconductor structures by employing a plasma pre-treatment to eliminate surface impurities. The process involves a selective etch that effectively removes molybdenum oxide using a precursor solution of molybdenum chloride at precise temperature controls, followed by a post-treatment to ensure cleanliness after etching.

2. **One chamber multi-station selective metal removal** - This patent describes a selective metal removal method utilizing gradient oxidation to achieve gap-fill. The process involves multiple stations within a processing chamber, where a semiconductor wafer undergoes a reduction process, followed by gradient oxidation and etching to precisely control the metal removal for optimal feature definition.

Career Highlights

Ju Hyun Oh is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His expertise in semiconductor processing technologies has played a vital role in the advancement of manufacturing techniques that are essential for modern electronics.

Collaborations

Throughout his career, Ju Hyun Oh has collaborated with notable professionals, including coworkers Shiyu Yue and Yu Lei. These collaboration efforts further enhance the innovation landscape within their firm, driving forward progress in semiconductor technology.

Conclusion

Ju Hyun Oh’s innovative contributions and patents demonstrate his profound impact on the semiconductor industry. His work at Applied Materials, Inc. signifies the importance of research and development in maintaining technological advancements in semiconductor manufacturing. As technology continues to evolve, inventors like Oh will remain pivotal in shaping the future of electronics.