Company Filing History:
Years Active: 2000
Title: Joung-hyun Lim: Innovator in Dry Etching Technology
Introduction
Joung-hyun Lim is a notable inventor based in Yongin, South Korea. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of dry etching technology. His innovative approach has led to advancements that enhance the efficiency and effectiveness of etching processes.
Latest Patents
Joung-hyun Lim holds a patent for a "Dry etching apparatus having upper and lower electrodes with grooved." This invention addresses the challenge of suppressing the formation of reaction products, such as polymers, within the etching chamber. The design includes a gas supply connected to the top of the chamber and a pump at the bottom, facilitating improved conductance and exhaust velocity. The incorporation of grooves in the insulation plates of the electrodes and the sidewalls of the chamber allows for better dispersion of accumulated polymers, thereby enhancing the etching process.
Career Highlights
Lim is currently employed at Samsung Electronics Co., Ltd., where he continues to develop innovative solutions in semiconductor technology. His work has been instrumental in advancing the capabilities of dry etching apparatuses, making them more efficient and reliable for industrial applications.
Collaborations
He has collaborated with Hee-Sun Chae, contributing to the development of cutting-edge technologies in their field. Their partnership has fostered a creative environment that encourages innovation and problem-solving.
Conclusion
Joung-hyun Lim's contributions to dry etching technology exemplify the impact of innovative thinking in the semiconductor industry. His patent reflects a commitment to improving manufacturing processes and enhancing product quality.