Joseph V Abernathy

Title: Joseph V Abernathy: Innovator in Processing Apparatus Technology

Introduction

Joseph V Abernathy is a notable inventor based in Wylie, Texas. He has made significant contributions to the field of processing apparatus technology, particularly in systems that utilize vacuum wafer transport. With a total of 2 patents to his name, Abernathy's work has advanced the efficiency and effectiveness of wafer processing.

Latest Patents

Abernathy's latest patents include innovative processing apparatuses designed to enhance wafer handling and processing. One of his patents describes a process module that is compatible with vacuum wafer transport systems. This module allows wafers to be transported and processed in a face-down position under vacuum. It features an additional wafer movement mechanism, enabling the susceptor to rotate from a horizontal to a nearly vertical position. This design facilitates processing by a top process module, such as a sputter system or inspection module, while also allowing for processing by a lower module in a horizontal position.

Another patent focuses on a processing apparatus and method that permits sputter deposition within a vacuum processing system. Similar to his previous invention, this apparatus allows for the rotation of the susceptor, enabling sputter deposition while the wafer is in a vertical position. The design also incorporates in situ or remote plasma capabilities, allowing for a dry deglaze or cleanup step before sputter deposition.

Career Highlights

Joseph V Abernathy has built a successful career at Texas Instruments Corporation, where he has been instrumental in developing advanced processing technologies. His innovative approaches have contributed to the company's reputation as a leader in the semiconductor industry.

Collaborations

Throughout his career, Abernathy has collaborated with talented individuals such as Cecil J Davis and Robert T Matthews. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies in wafer processing.

Conclusion

Joseph V Abernathy's contributions to processing apparatus technology have significantly impacted the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in wafer processing systems.