Company Filing History:
Years Active: 2022-2024
Title: Joseph Nesmith: Innovator in Substrate Processing Systems
Introduction
Joseph Nesmith is a notable inventor based in Dundee, Oregon, who has made significant contributions to the field of substrate processing systems. With a total of 2 patents to his name, he has developed innovative methods that enhance the efficiency of these systems.
Latest Patents
Nesmith's latest patents focus on systems and methods for reducing effluent build-up in a pumping exhaust system. One of his methods involves arranging a substrate on a substrate support in a processing chamber during a substrate treatment process. This process includes supplying one or more process gases to the chamber and an inert dilution gas at a first flow rate to the pumping exhaust system. After performing the substrate treatment, the method continues with the evacuation of reactants from the chamber. Following this, cleaning plasma, including cleaning gas, is supplied during a cleaning process, with the inert dilution gas being supplied at a second flow rate that is less than the first.
Career Highlights
Joseph Nesmith is currently employed at Lam Research Corporation, where he applies his expertise in substrate processing technologies. His work has contributed to advancements in the efficiency and effectiveness of substrate treatment processes.
Collaborations
Nesmith has collaborated with notable coworkers, including Antonio Xavier and Steven Goza, who share his commitment to innovation in the field.
Conclusion
Joseph Nesmith's contributions to substrate processing systems through his patents and work at Lam Research Corporation highlight his role as an influential inventor. His innovative methods continue to impact the industry positively.