Location History:
- Fremont, CA (US) (2013)
- Alameda, CA (US) (2010 - 2014)
Company Filing History:
Years Active: 2010-2014
Title: Innovations by Inventor Jose Tong Sam
Introduction
Jose Tong Sam is an accomplished inventor based in Alameda, CA. He has made significant contributions to the field of gas distribution systems, particularly in plasma processing technology. With a total of 3 patents to his name, his work has advanced the efficiency and effectiveness of gas switching capabilities in various applications.
Latest Patents
One of his notable patents is a gas distribution system having fast gas switching capabilities. This innovative system is designed to supply different gas compositions to a chamber, such as a plasma processing chamber. The system includes a gas supply section, a flow control section, and a switching section. The gas supply section provides first and second gases to the flow control section, which manages the flow of these gases to the chamber. The system is capable of continuously supplying gases and quickly switching between them without causing pressure surges or flow instabilities.
Another significant patent is the fast gas switching plasma processing apparatus. This invention features a plasma chamber with a plasma confinement zone and an electrode. The gas distribution system can replace one gas in the plasma zone with another within a period of less than 1 second. This rapid switching capability is enhanced by the use of frequency-tuned RF power sources that minimize reflected RF power, ensuring efficient operation.
Career Highlights
Jose Tong Sam is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to focus on developing advanced technologies that improve plasma processing techniques.
Collaborations
Throughout his career, Jose has collaborated with talented individuals such as Zhisong Huang and Eric H Lenz. These collaborations have contributed to the successful development of innovative technologies in the field.
Conclusion
Jose Tong Sam's contributions to gas distribution systems and plasma processing technology have made a significant impact in the industry. His innovative patents and work at Lam Research Corporation highlight his dedication to advancing technology in this field.