Company Filing History:
Years Active: 2022-2025
Title: Innovator Jongkeun Oh: Pioneering Advances in Extreme Ultraviolet Technology
Introduction
Jongkeun Oh, a talented inventor based in Seoul, South Korea, has made significant contributions to the field of extreme ultraviolet (EUV) technology. With a total of two patents to his name, Oh's innovations are pivotal in the advancement of photomask manufacturing processes, which are crucial for next-generation lithography in semiconductor production.
Latest Patents
Oh's latest patents include a "Method of manufacturing extreme ultraviolet (EUV) photomask" and a "Method and apparatus for correcting EUV photomask." The first patent describes a comprehensive method that encompasses preparing a mask blank, which includes a substrate, a reflective layer for reflecting extreme ultraviolet light, and a light-absorbing layer. This innovative process further details steps such as forming pattern elements, identifying correction target areas, applying etchants, and using laser irradiation for enhanced accuracy.
In his second patent, Oh outlines a new reticle design for an apparatus specializing in EUV exposure. This design features a substrate with edge and main regions, integrated multi-layer structures, and a layered absorber that enhances the performance and effectiveness of the reticle in advanced lithographic applications.
Career Highlights
Jongkeun Oh is currently associated with Samsung Electronics Co., Ltd., a leading global company renowned for its innovation in technology. His expertise in EUV technologies has positioned him as a crucial figure among the industry’s innovators.
Collaborations
Throughout his career, Oh has collaborated with fellow innovators such as Mankyu Kang and Hoon Tae Kim, contributing to a dynamic exchange of ideas and advancements in their respective projects. This collaborative spirit fosters creativity and leads to groundbreaking developments in their field.
Conclusion
Jongkeun Oh’s contributions to the development of extreme ultraviolet photomask technology and his inventive methods continue to push the boundaries of semiconductor manufacturing. As the demand for advanced technological solutions grows, Oh’s innovations are set to play a vital role in shaping the future of the industry. His work exemplifies the innovative spirit essential for advancement in the ever-evolving field of technology.