This inventor holds 2 USPTO granted patents. Top assignee: Chartered Semiconductor Manufacturing Ltd (Corporation). Active years: 2003-2004.
Company Filing History:
Years Active: 2003-2004
Title: Innovations by Johnny Cham in Semiconductor Manufacturing
Introduction
Johnny Cham is a notable inventor based in Singapore, recognized for his contributions to semiconductor manufacturing. He holds 2 patents that showcase his innovative methodologies in the field. His work focuses on enhancing the efficiency and effectiveness of semiconductor processing tools.
Latest Patents
One of Johnny Cham's latest patents is a methodology to obtain integrated process results prior to the installation of processing tools. This invention ensures that integrated process results are verified before the installation of processing tools in semiconductor manufacturing foundries. The methodology involves subdividing the complete set of processing tools into short-loops or sub-modules, which are then combined into a full loop. This gradual combination allows for evaluation and optimization of the processing tools, ultimately leading to a complete processing loop.
Another significant patent by Cham involves using refractory metal silicidation phase transition temperature points to control and calibrate rapid thermal process (RTP) systems. This method describes the silicidation of wafers with a silicon semiconductor substrate and a refractory metal layer at varying temperatures. By measuring the sheet resistance uniformity, the phase transition temperature points are detected, which are crucial for calibrating the RTP systems. This innovation enhances the precision of temperature control in semiconductor processing.
Career Highlights
Johnny Cham has made significant strides in his career at Chartered Semiconductor Manufacturing Ltd. His expertise in semiconductor processes has positioned him as a key figure in the industry. His innovative approaches have contributed to advancements in manufacturing techniques, making him a valuable asset to his organization.
Collaborations
Throughout his career, Johnny has collaborated with notable colleagues, including Zhong Yun Zhu and Rajneesh Jaiswal. These collaborations have fostered a creative environment that encourages the development of groundbreaking technologies in semiconductor manufacturing.
Conclusion
Johnny Cham's contributions to semiconductor manufacturing through his innovative patents demonstrate his commitment to advancing technology in the field. His methodologies not only improve processing efficiency but also set new standards for future developments in semiconductor manufacturing.