John R Hauser

Title: John R Hauser: Innovator in Semiconductor Technology

Introduction

John R Hauser is a notable inventor based in Raleigh, NC (US), recognized for his contributions to semiconductor technology. With a total of 5 patents, he has made significant advancements in the field, particularly in the area of MOSFET test structures and rapid thermal processing systems.

Latest Patents

One of his latest patents is the "MOSFET test structure for capacitance-voltage measurements." This innovative apparatus and method are used to extract polysilicon gate doping from capacitance-voltage analysis in strong inversion, especially for ultrathin gate oxides. For sub-20-angstrom oxide MOS devices, transistors with channel lengths less than about 10 µm are connected in parallel to avoid extrinsic capacitance roll-off in strong inversion. The upper limit of the channel length is estimated using a transmission-line model of the terminal capacitance, which accounts for the non-negligible gate tunneling current and finite channel resistance.

Another significant patent is the "Three-zone rapid thermal processing system utilizing wafer edge heating." This system includes three arrays of radiant heating lamps for heating a semiconductor wafer. The arrays are positioned along the axis of the wafer, ensuring efficient heating from all sides. A wafer holder maintains the wafer face transverse to the common axis of the radiant heating lamps, while reflectors at each array reflect radiant heat onto the wafer. The arrays are independently connected to power sources and a controller to provide efficient coupling of the heat sources and a uniform temperature distribution across the wafer.

Career Highlights

John R Hauser has worked at North Carolina State University, where he has contributed to various research projects and innovations in semiconductor technology. His work has had a lasting impact on the field, particularly in the development of advanced testing and processing techniques.

Collaborations

Throughout his career, John has collaborated with notable individuals such as Furman Y Sorrell and Jimmie J Wortman. These collaborations have further enhanced his research and development efforts in semiconductor technology.

Conclusion

John R Hauser is a distinguished inventor whose work in semiconductor technology has led to significant advancements and innovations. His contributions continue to influence the industry and inspire future developments in the field.