Company Filing History:
Years Active: 2017
Title: Joao L G Ferreira: Innovator in Electrostatic Clamping Technology
Introduction
Joao L G Ferreira is a notable inventor based in Yatton, GB. He has made significant contributions to the field of electrostatic clamping technology, particularly in the processing of dielectric wafers. His innovative approach has implications for various applications in the semiconductor industry.
Latest Patents
Joao L G Ferreira holds a patent for an "Electrostatic clamping method and apparatus." This invention describes a method of electrostatically clamping a dielectric wafer to a processing table during plasma processing. The table features interdigitated electrodes embedded within it. The method involves applying respective voltages of opposite first and second polarities to adjacent electrodes, inducing polarization charges in the wafer with opposite polarity to the underlying electrodes. This process effectively clamps the wafer to the table. After a predetermined time (t), the polarities of the voltages are reversed, allowing the polarization charges and electrostatic clamping to continue. The switching time between the first and second polarities is less than 2 seconds.
Career Highlights
Joao L G Ferreira is currently employed at Oxford Instruments Nanotechnology Tools Limited, where he continues to develop and refine his innovative technologies. His work has positioned him as a key player in the advancement of nanotechnology tools.
Collaborations
Throughout his career, Joao has collaborated with talented individuals such as Yiping Song and Michael Cooke. These partnerships have fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
Joao L G Ferreira's contributions to electrostatic clamping technology highlight his role as an influential inventor in the field. His patent and ongoing work at Oxford Instruments Nanotechnology Tools Limited demonstrate his commitment to advancing technology in the semiconductor industry.