This inventor holds 3 USPTO granted patents and 4 published patent applications. Top assignees: L'air Liquide,societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude, Air Liquide Electronics U.S. LP. Active years: 2020-2024.
Location History:
- Tsukuba, JP (2020)
- Ibaraki, JP (2021)
Company Filing History:
3 out of 1,519 
1 out of 37 
Years Active: 2020-2024
Title: Jiro Yokota: Innovator in Semiconductor Processes
Introduction
Jiro Yokota is a notable inventor based in Tsukuba, Japan. He has made significant contributions to the field of semiconductor processes, holding a total of 3 patents. His work focuses on innovative methods and systems that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
Yokota's latest patents include groundbreaking technologies such as "Systems and methods for storage and supply of F3NO-free FNO gases and F3NO-free FNO gas mixtures for semiconductor processes." This patent outlines a method for storing and supplying F3NO-free FNO-containing gas, which involves using a NiP coated steel cylinder with a polished inner surface. The process includes releasing the gas from the cylinder to a manifold assembly and de-pressurizing it for use in a target reactor. Another significant patent is "Chemistries for etching multi-stacked layers," which details methods for fabricating 3D NAND flash memory. This method includes forming a hardmask pattern and selectively plasma etching alternating layers using specific hydrofluorocarbon etching gases.
Career Highlights
Throughout his career, Jiro Yokota has worked with prominent companies in the industry. He has been associated with Air Liquide and Air Liquide Electronics U.S. LP, where he contributed to advancements in semiconductor technologies. His expertise has played a crucial role in the development of innovative solutions in the field.
Collaborations
Yokota has collaborated with notable professionals in his field, including Peng Shen and Chih-Yu Hsu. These collaborations have further enriched his work and contributed to the advancement of semiconductor processes.
Conclusion
Jiro Yokota's contributions to semiconductor processes through his patents and career achievements highlight his role as an influential inventor. His innovative methods continue to shape the future of semiconductor manufacturing.