Company Filing History:
Years Active: 2022
Title: Jinyan Song: Innovator in Metrology Systems
Introduction
Jinyan Song is a prominent inventor based in Milpitas, CA (US). She has made significant contributions to the field of metrology, particularly in the area of tilt calculation. Her innovative work has led to the development of a patented system that enhances the accuracy of overlay measurements in lithography processes.
Latest Patents
Jinyan Song holds a patent for a "System and method for tilt calculation based on overlay metrology measurements." This patent describes a metrology system that includes a controller connected to various metrology tools. The system is designed to receive overlay metrology measurements from metrology targets and determine tilt based on these measurements. Additionally, it identifies correctables for lithography or metrology tools to adjust for tilt, ultimately reducing overlay inaccuracies. This invention is crucial for improving the precision of semiconductor manufacturing processes.
Career Highlights
Jinyan Song is currently employed at Kla Corporation, a leading company in the field of metrology and inspection solutions. Her role involves leveraging her expertise to develop advanced metrology systems that enhance manufacturing accuracy. With her innovative mindset, she continues to push the boundaries of technology in her field.
Collaborations
Throughout her career, Jinyan has collaborated with talented professionals, including Roie Volkovich and Paul MacDonald. These collaborations have fostered an environment of innovation and have contributed to the success of her projects.
Conclusion
Jinyan Song is a remarkable inventor whose work in metrology systems has made a significant impact on the industry. Her patented innovations are paving the way for more accurate and efficient manufacturing processes.