Jing-Sen Wang

Title: Innovations of Jing-Sen Wang in Semiconductor Technology

Introduction

Jing-Sen Wang is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the processes involved in semiconductor wafer fabrication and defect detection.

Latest Patents

One of his latest patents is titled "Overlay error and process window metrology." This method provides an inline inspection technique during semiconductor wafer fabrication. It involves forming a plurality of test structures on a semiconductor wafer along two opposite directions. An offset distance between a sample feature and a target feature of each of the test structures increases gradually along these directions. The method further includes producing an image of the test structures and performing image analysis to recognize a position with an extreme of a gray level. Additionally, it calculates an overlay error based on the recognized position.

Another notable patent is "Method, test line and system for detecting semiconductor wafer defects." This invention presents a method, a test line, and a system for detecting defects on a semiconductor wafer. The method includes measuring a current-voltage (IV) curve of a plurality of metal oxide semiconductor (MOS) transistors connected in series in a test key. It compares the measured IV curve with a reference curve to obtain a first drain current drop in a linear region and a second drain current drop in a saturation region. This allows for determining whether at least one of the MOS transistors is defective based on the current drops.

Career Highlights

Jing-Sen Wang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing the technology used in semiconductor fabrication and defect detection.

Collaborations

He has collaborated with notable colleagues, including Yuan-Yao Chang and Shang-Wei Fang, contributing to various projects within the semiconductor field.

Conclusion

Jing-Sen Wang's innovative patents and contributions to semiconductor technology highlight his expertise and commitment to advancing the industry. His work continues to influence the development of more efficient and reliable semiconductor manufacturing processes.