This inventor holds 4 USPTO granted patents. Top assignee: Memc Electronic Materials, Inc.. Active years: 1997-1998.
Company Filing History:
Years Active: 1997-1998
Title: Innovations by Inventor Jing Chai
Introduction
Jing Chai is an accomplished inventor based in St. Charles, MO (US). She has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. Her work focuses on innovative cleaning processes and apparatuses for semiconductor wafers, which are crucial in the manufacturing of electronic devices.
Latest Patents
One of Jing Chai's latest patents is an "Apparatus for cleaning semiconductor wafers." This apparatus includes a tank for containing a liquid and receiving a wafer holder, with at least a portion of the wafers immersed in the liquid. A sonic energy generator imparts sonic energy to the liquid, while a wafer-moving mechanism in the tank reciprocates and rotates the semiconductor wafer. This design ensures that the wafer repeatedly passes through the upper surface of the liquid, enhancing the cleaning process.
Another notable patent is the "Post-lapping cleaning process for silicon wafers." This process involves contacting the wafer with an oxidizing agent to oxidize organic contaminants. The wafer is then immersed in an aqueous bath comprising citric acid, into which sonic energy is directed to remove metallic contaminants. Following this, the wafer is treated with hydrofluoric acid to eliminate silicon dioxide layers, and finally immersed in an alkaline bath with a surfactant, again utilizing sonic energy for effective cleaning.
Career Highlights
Jing Chai is currently employed at Memc Electronic Materials, Inc., where she continues to innovate in the semiconductor field. Her expertise and dedication have led to advancements that improve the efficiency and effectiveness of semiconductor wafer cleaning processes.
Collaborations
Throughout her career, Jing has collaborated with notable colleagues, including Henry Frank Erk and Ronald D Bartram. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Jing Chai's contributions to semiconductor technology through her patents and collaborative efforts highlight her role as a leading inventor in her field. Her innovative approaches to cleaning semiconductor wafers are paving the way for advancements in electronic manufacturing.