This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2018.
Company Filing History:
Years Active: 2018
Title: Innovations of Jin-Pyoung Kim in Liquid Leakage Sensing Technology
Introduction
Jin-Pyoung Kim is an accomplished inventor based in Suwon, South Korea. He has made significant contributions to the field of lithography apparatus through his innovative patent. His work focuses on enhancing the reliability and efficiency of extreme ultraviolet (EUV) light generating apparatus.
Latest Patents
Jin-Pyoung Kim holds a patent for an "Apparatus and method of sensing liquid leakage for lithography apparatus." This invention aims to prevent contamination of the collector mirror by detecting leakage of cooling water supplied to it. The liquid leakage sensing apparatus comprises a collector mirror module, a cooling unit that supplies cooling water, a gas supply unit for introducing a water-soluble gas, and a sensing unit that detects any leaked gas outside the cooling unit. This innovation is crucial for maintaining the integrity of lithography processes.
Career Highlights
Jin-Pyoung Kim is associated with Samsung Electronics Co., Ltd., a leading technology company known for its advancements in electronics and innovation. His work at Samsung has positioned him as a key player in the development of cutting-edge technologies in the semiconductor industry.
Collaborations
Jin-Pyoung Kim has collaborated with notable colleagues, including Sung-Jo Hwang and Sung-Joo Kim. Their teamwork has contributed to the successful development of innovative solutions in their respective fields.
Conclusion
Jin-Pyoung Kim's contributions to liquid leakage sensing technology exemplify the importance of innovation in the semiconductor industry. His patent not only enhances the functionality of lithography apparatus but also showcases the collaborative spirit within Samsung Electronics.