This inventor holds 2 USPTO granted patents and 3 published patent applications. Top assignees: Samsung Electronics Ltd., Pohang University of Science and Technology Foundation. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Jimo Lee - Innovator in Substrate Processing Technology
Introduction
Jimo Lee is an inventive woman based in Suwon-si, South Korea. She is recognized for her contributions to the field of substrate processing technology. Although she currently holds no granted patents, her innovative ideas are reflected in her latest patent applications.
Latest Patent Applications
1. **APPARATUS FOR PROCESSING A SUBSTRATE** - This apparatus includes a substrate supporting unit designed to support the substrate. It features a control assembly located along the outer edge of the substrate supporting unit, which consists of multiple blades. These blades can combine to form a control ring that encircles the outer edge of the substrate supporting unit. Additionally, a plasma generating unit is positioned to face the substrate supporting unit, with the control ring's inner diameter being adjustable during the operation of the plasma generating unit.
2. **SUBSTRATE PROCESSING APPARATUS INCLUDING EDGE BIAS SUPPLY PORTION** - This substrate processing apparatus comprises a chamber and a support member located inside the chamber. The support member includes a bias electrode and an edge bias electrode. It also features a bias supply portion that is electrically connected to the bias electrode, along with an edge bias supply portion that connects to the edge bias electrode.
Conclusion
Jimo Lee's innovative approaches in substrate processing technology showcase her potential as an inventor. Her latest patent applications reflect her commitment to advancing this field.