Jie Chen

Title: Jie Chen - Innovator in Dry-Etching Technology

Introduction

Jie Chen is a notable inventor based in Cupertino, CA, who has made significant contributions to the field of materials science. His innovative work primarily focuses on the dry-etching of indium and tin oxides, which has important applications in various technological sectors.

Latest Patents

Jie Chen holds a patent for a method of dry-etching indium and tin oxides. This etch method involves providing a material layer consisting of indium oxide (InO), tin oxide (SnO), or a mixture of both. The process includes supplying a reactive gas that contains halogen and oxygen compounds to the vicinity of the material layer. An electric field is then applied to facilitate the reaction between the reactive gas and the material layer, resulting in the formation of volatile byproducts.

Career Highlights

Jie Chen is currently employed at Applied Komatsu Technology, Inc., where he continues to advance his research and development efforts. His work has been instrumental in enhancing the efficiency and effectiveness of etching processes in semiconductor manufacturing.

Collaborations

Jie Chen collaborates with Yuen-Kui (Jerry) Wong, leveraging their combined expertise to push the boundaries of innovation in their field.

Conclusion

Jie Chen's contributions to dry-etching technology exemplify the impact of innovative thinking in materials science. His patent and ongoing work at Applied Komatsu Technology, Inc. highlight his role as a key player in advancing technological solutions.