Company Filing History:
Years Active: 2004-2005
Title: Innovations of Jianhui Chen
Introduction
Jianhui Chen is a notable inventor based in Fremont, CA, who has made significant contributions to the field of optical metrology. With a total of three patents to his name, he has developed innovative technologies that enhance the performance of optical instruments.
Latest Patents
One of Jianhui Chen's latest patents is the "Refractive Focusing Element for Spectroscopic Ellipsometry." This invention features a broadband ellipsometer equipped with an all-refractive optical system designed to focus a probe beam onto a sample. The ellipsometer utilizes a broadband light source that emits wavelengths in both the UV and visible regions of the spectrum. The change in polarization state of the light reflected from the sample is utilized to evaluate its characteristics. The probe beam is focused onto the sample using a composite lens system made from materials that are transmissive in the UV and visible wavelengths, effectively minimizing chromatic aberrations. The spot size on the sample can be less than 3 mm, and the aberration is controlled such that the focal shift over the range of wavelengths is less than five percent of the mean focal length of the system.
Another significant patent is the "Coaxial Illumination System." This invention presents a method and apparatus for combining the spectral outputs of multiple light sources to create a high-efficiency broadband illuminator for optical metrology. The illuminator merges the output radiation from several broadband lamps in a unique optical arrangement that generates a virtual source while avoiding the use of beam-splitters. This innovative design results in enhanced performance at a reduced cost and can be optimized for various applications in optical metrology instruments.
Career Highlights
Jianhui Chen is currently employed at Thermawave, Inc., where he continues to push the boundaries of optical technology. His work has been instrumental in advancing the capabilities of optical metrology, making significant impacts in various applications.
Collaborations
Throughout his career, Jianhui has collaborated with notable colleagues, including Craig E. Uhrich and David M. Aikens. These collaborations have contributed to the development of cutting-edge technologies in the field.
Conclusion
Jianhui Chen's innovative patents and contributions to optical metrology highlight his expertise and dedication to advancing technology. His work continues to influence the industry and pave the way for future innovations.