Company Filing History:
Years Active: 2017-2025
Title: Innovations of Jia-Wei Xu in Semiconductor Technology
Introduction
Jia-Wei Xu is a prominent inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on enhancing processes that are critical to semiconductor manufacturing.
Latest Patents
One of his latest patents is the "Split valve air curtain." This invention addresses contamination from outgassing during a deposition process through a series of equipment enhancements. These enhancements include throttle valves, a dual air curtain, and a residual gas analysis (RGA) monitor. The dual air curtain can be configured to flow a first gas during wafer processing and a second gas during wafer unloading, effectively redirecting and capturing outgassed species. The throttle valves and dual air curtain can be programmed in an automated feedback control system that utilizes data from the RGA monitor.
Another notable patent is the "Apparatus and operation method thereof." This apparatus includes a body and a surface designed to receive a semiconductor wafer carrier. It features a nozzle and a venting hole on the surface. The semiconductor wafer carrier is equipped with at least one selectively closable capped opening, which is configured to couple with the nozzle to create a substantially oxygen-free environment within the carrier. The vent hole allows gas to flow out of the semiconductor wafer carrier. Additionally, the apparatus includes a sensor to monitor ambient conditions and a controller to adjust a control valve based on these conditions, thereby controlling the gas flow from the nozzle.
Career Highlights
Jia-Wei Xu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work has contributed to advancements in manufacturing processes, enhancing efficiency and product quality.
Collaborations
Some of his notable coworkers include Si-Wen Liao and Mao-Cheng Lin, who collaborate with him on various projects within the semiconductor field.
Conclusion
Jia-Wei Xu's contributions to semiconductor technology through his patents demonstrate his commitment to innovation and excellence in the industry. His work continues to influence advancements in manufacturing processes, ensuring higher quality and efficiency in semiconductor production.