Company Filing History:
Years Active: 1988
Title: The Innovative Contributions of Jerris H Peavey
Introduction
Jerris H Peavey is a notable inventor based in Novato, California. He has made significant contributions to the field of semiconductor processing, holding a total of 2 patents. His work focuses on improving mechanisms and processes that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
One of Peavey's latest patents is for a mechanism known as magnetically coupled wafer lift pins. This invention presents an improved pin lift mechanism for plasma processing of semiconductor wafers. The design features pins contained in non-magnetic tubes that are sealed to the wafer chuck. A magnetic slug in each tube couples external motion of a magnet to the pin, allowing for precise control during the processing of wafers.
Another significant patent is related to the chrome mask etch process. This innovation enables the patterning of a chrome mask with PBS (polybutenesulfone) photoresist in a plasma reactor. The process involves covering the patterned photoresist with a glass layer, planarizing the glass layer, etching the photoresist, and then etching the chrome mask. The result is a pattern transferred to the chrome mask that is the negative or inverse of the pattern in the photoresist layer.
Career Highlights
Jerris H Peavey is currently associated with Tegal Corporation, where he continues to develop innovative solutions in semiconductor technology. His expertise and inventions have contributed to advancements in the industry, making him a valuable asset to his company.
Collaborations
Throughout his career, Peavey has collaborated with notable colleagues, including David J Drage and Roger B Lachenbruch. These collaborations have fostered an environment of innovation and creativity, leading to the development of cutting-edge technologies.
Conclusion
Jerris H Peavey's contributions to semiconductor processing through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to impact the industry positively, showcasing the importance of innovation in technology.