Company Filing History:
Years Active: 2010-2014
Title: Jeongseok Ha: Innovator in Metal Oxide Hardmask Technology
Introduction
Jeongseok Ha is a prominent inventor based in Tama, Japan. He has made significant contributions to the field of materials science, particularly in the development of advanced methods for forming metal oxide hardmasks. With a total of 5 patents to his name, Ha's work is recognized for its innovative approaches and practical applications.
Latest Patents
One of Ha's latest patents is titled "Method of forming metal oxide hardmask." This method involves providing a template made of photoresist or amorphous carbon on a substrate. It also includes depositing a metal oxide hardmask on the template using atomic layer deposition (ALD). The hardmask is constituted by a material with the formula SiMO, where M represents at least one metal element, x is less than one including zero, and y is approximately two or a stoichiometrically-determined number. Another notable patent is "Method of depositing film with tailored conformality." This method focuses on depositing a film with a target conformality on a patterned substrate. It includes depositing a first film on a convex pattern and a bottom surface, followed by a second film on the first film. This results in an integrated film that achieves the desired conformality.
Career Highlights
Jeongseok Ha is currently employed at Asm Japan K.K., where he continues to push the boundaries of innovation in his field. His work has not only advanced the technology but has also contributed to the efficiency and effectiveness of various manufacturing processes.
Collaborations
Ha collaborates with talented individuals in his field, including coworkers Atsuki Fukazawa and Nobuo Matsuki. Their combined expertise fosters a creative environment that enhances the development of groundbreaking technologies.
Conclusion
Jeongseok Ha's contributions to the field of materials science, particularly through his innovative patents, highlight his role as a leading inventor. His work continues to influence advancements in technology and manufacturing processes.