Jeong-Soo Suh

Title: Jeong-Soo Suh: Innovator in Semiconductor Technology

Introduction

Jeong-Soo Suh is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, particularly through his innovative methods for forming thin layers on semiconductor substrates.

Latest Patents

One of his notable patents is titled "Method for forming a thin layer on semiconductor substrates." This invention describes an apparatus and method that efficiently forms a thin layer on multiple semiconductor substrates. The processing chamber of the apparatus includes a boat that arranges the semiconductor substrates in a vertical direction. A vaporizer is utilized to vaporize a liquid metal precursor into a metal precursor gas. Additionally, a buffer receives a source gas from the vaporizer and increases its pressure to above atmospheric levels. This source gas includes the metal precursor gas, which is crucial for the process. The invention also features a first supply pipe that connects the buffer to the processing chamber, equipped with a valve to control the mass flow rate of the source gas. Furthermore, a second supply pipe connects the vaporizer to a pump, creating a vacuum inside the processing chamber, and includes a valve for exhausting a dummy gas during the vaporizer's idling operation.

Career Highlights

Jeong-Soo Suh is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to be at the forefront of semiconductor innovation, contributing to advancements that have a significant impact on technology.

Collaborations

Throughout his career, Jeong-Soo Suh has collaborated with notable colleagues, including Hyun-wook Lee and Wan-Goo Hwang. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in the semiconductor field.

Conclusion

Jeong-Soo Suh's contributions to semiconductor technology through his innovative patents and collaborations highlight his role as a key inventor in the industry. His work continues to influence advancements in electronics and semiconductor manufacturing.