Location History:
- München, DE (2004 - 2008)
- Munich, DE (2008)
Company Filing History:
Years Active: 2004-2008
Title: Jenspeter Rau: Innovator in Optical Measurement Technologies
Introduction
Jenspeter Rau is a notable inventor based in Munich, Germany. He has made significant contributions to the field of optical measurement technologies, holding a total of 7 patents. His work focuses on methods and apparatuses that enhance the precision of measurements in various applications.
Latest Patents
One of Jenspeter Rau's latest patents is a method and apparatus for determining local variation of the reflection or transmission behavior over a mask surface. This innovative approach involves directing a focused light beam onto a surface patch of a mask, which is then decomposed into partial beams through diffraction at a structure on the mask's surface. Detectors are strategically placed to measure the intensity of at least two orders of diffraction, allowing for a comparative analysis of the measured intensities. This method can infer variations in reflection or transmission across the mask surface, as well as line width fluctuations within the mask's structure.
Another significant patent is an apparatus for measuring exposure intensity on a wafer. This apparatus includes an exposure device that generates radiation with a predetermined wavelength. A mask is positioned at a specific distance from the exposure device for patterned exposure of a wafer. Additionally, a detection device measures the exposure intensity at another predetermined distance, while a compensation device can be adjusted within the beam path to influence the measurement.
Career Highlights
Throughout his career, Jenspeter Rau has worked with prominent companies such as Infineon Technologies AG and Fresenius Medical Care Deutschland GmbH. His experience in these organizations has allowed him to develop and refine his innovative ideas in optical measurement technologies.
Collaborations
Jenspeter has collaborated with notable professionals in his field, including Frank-Michael Kamm and Siegfried Schwarzl. These collaborations have contributed to the advancement of his research and the successful development of his patents.
Conclusion
Jenspeter Rau's contributions to optical measurement technologies demonstrate his innovative spirit and dedication to advancing the field. His patents reflect a deep understanding of the complexities involved in measurement techniques, making him a significant figure in the industry.
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