Radebeul, Germany

Jens Busch

This inventor holds 2 USPTO granted patents. Top assignees: Advanced Micro Devices Corporation, Globalfoundries Inc.. Active years: 2011-2012.


% Patents Active = 50.0

Average Co-Inventor Count = 4.0

ph-index = 2

Forward Citations = 6(Granted Patents)


Company Filing History:


Years Active: 2011-2012

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2 patents (USPTO):Explore Patents

Title: Jens Busch: Innovator in Semiconductor Processing

Introduction

Jens Busch is a notable inventor based in Radebeul, Germany. He has made significant contributions to the field of semiconductor processing, holding 2 patents that showcase his innovative approach to improving manufacturing efficiency and accuracy.

Latest Patents

One of Jens Busch's latest patents is titled "Method and apparatus for dispatching workpieces to tools based on processing and performance history." This invention involves retrieving metrology data associated with multiple workpieces processed at a selected operation. It determines a processing context for each workpiece, identifying previous tools used in prior operations. By analyzing performance metrics for various tools, the invention optimizes the dispatching of workpieces to the most suitable tools based on their processing context.

Another significant patent is the "Method and system for reducing overlay errors in semiconductor volume production using a mixed tool scenario." This patent addresses the alignment accuracy in lithography processes by considering the combination of substrate holders in different tools. It provides overlay correction data for various process flows, allowing for more flexible tool usage while maintaining high precision in semiconductor manufacturing.

Career Highlights

Jens Busch has worked with prominent companies in the semiconductor industry, including GlobalFoundries Inc. and Advanced Micro Devices Corporation. His experience in these organizations has contributed to his expertise in developing innovative solutions for complex manufacturing challenges.

Collaborations

Throughout his career, Jens has collaborated with notable professionals such as Uwe Schulze and Rolf Seltmann. These partnerships have further enriched his work and contributed to advancements in semiconductor technology.

Conclusion

Jens Busch is a distinguished inventor whose work in semiconductor processing has led to valuable patents that enhance manufacturing efficiency and accuracy. His contributions continue to influence the industry and pave the way for future innovations.

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