The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 10, 2012
Filed:
Mar. 31, 2009
Method and apparatus for dispatching workpieces to tools based on processing and performance history
Robert Barlovic, Dresden, DE;
Uwe Schulze, Dresden, DE;
Jan Raebiger, Dresden, DE;
Joerg Weigang, Dresden, DE;
Jens Busch, Radebeul, DE;
Rolf Seltmann, Dresden, DE;
Robert Barlovic, Dresden, DE;
Uwe Schulze, Dresden, DE;
Jan Raebiger, Dresden, DE;
Joerg Weigang, Dresden, DE;
Jens Busch, Radebeul, DE;
Rolf Seltmann, Dresden, DE;
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
Metrology data associated with a plurality of workpieces processed at a selected operation in the process flow including a plurality of operations is retrieved. A processing context associated with each of the workpieces is determined. The processing context identifies at least one previous tool used to perform an operation on the associated workpiece prior to the selected operation. A plurality of performance metrics is determined for a plurality of tools capable of performing the selected operation based on the metrology data. Each performance metric is associated with a particular tool and a particular processing context. A set of the performance metrics is identified for the plurality of tools having a processing context matching a processing context of a selected workpiece awaiting performance of the selected operation. The selected workpiece is dispatched for processing in a selected one of the plurality of tools based on the set of performance metrics.