Company Filing History:
Years Active: 1985
Title: The Innovations of Jenq S Chang
Introduction
Jenq S Chang is a notable inventor based in Santa Clara County, CA. He has made significant contributions to the field of semiconductor technology, particularly in the area of CMOS integrated circuit chips. His work has led to advancements that enhance the performance and reliability of electronic devices.
Latest Patents
Jenq S Chang holds a patent for the "Reduction of contact resistance in CMOS integrated circuit chips." This patent presents a process for forming openings (vias) in the glass layer of complementary metal oxide semiconductor (CMOS) integrated circuit chips. The method involves applying a pattern of openings to the glass layer using conventional resist/mask techniques. A plasma is utilized to remove the glass and the silicon dioxide layer, exposing portions of the N+ and P+ circuit elements. The exposure to plasma decreases the conductivity of the crystalline lattice structure of the N+ material, which adds resistance between the N+ material and the metallization layer. To mitigate this added resistance, the chip is placed in an inert gas atmosphere at an elevated temperature for a specific duration before applying the metallization layer. This innovative approach has proven effective in reducing contact resistance to acceptable levels.
Career Highlights
Jenq S Chang is currently associated with Storage Technology Partners, where he continues to work on cutting-edge technologies in the semiconductor industry. His expertise and innovative mindset have positioned him as a valuable asset in his field.
Collaborations
One of his notable collaborators is Tung S Chang, with whom he has worked closely on various projects. Their combined efforts have contributed to advancements in semiconductor technology.
Conclusion
Jenq S Chang's contributions to the field of semiconductor technology, particularly through his patent on reducing contact resistance in CMOS integrated circuit chips, highlight his innovative spirit and dedication to improving electronic devices. His work continues to influence the industry positively.