Jennan Yu

Title: The Innovative Contributions of Jennan Yu

Introduction

Jennan Yu is a prominent inventor based in San Diego, California. She has made significant contributions to the field of laser technology, particularly in the development of high repetition rate gas discharge lasers. With a total of two patents to her name, her work has had a substantial impact on integrated circuit fabrication processes.

Latest Patents

One of Jennan Yu's latest patents is a high repetition rate gas discharge laser with precise pulse timing control. This compact and modular ultraviolet laser serves as a light source for rapid inspections of wafers during the integrated circuit fabrication process. It is also beneficial for reticle writing at high speeds. The preferred embodiment of this invention operates at pulse repetition rates ranging from 1000 to 4000 Hz, making it suitable for continuous production line operations. The design includes a pulse control unit that ensures pulse timing accuracy of less than 4 nanoseconds. Additionally, this gas discharge laser can be configured to operate with various gas mixtures, producing ultraviolet light pulses at wavelengths of 248 nm, 197 nm, or 157 nm.

Career Highlights

Jennan Yu is currently employed at Cymer, Inc., a company known for its advancements in photolithography technology. Her work at Cymer has positioned her as a key player in the development of innovative laser solutions for the semiconductor industry.

Collaborations

Throughout her career, Jennan has collaborated with notable colleagues, including Palash P Das and Stuart L Anderson. These collaborations have further enhanced her contributions to the field of laser technology.

Conclusion

Jennan Yu's innovative work in laser technology, particularly her patents related to high repetition rate gas discharge lasers, showcases her expertise and dedication to advancing the semiconductor industry. Her contributions continue to influence the efficiency and effectiveness of integrated circuit fabrication processes.