Jenn C Chow

Title: Innovations by Jenn C Chow

Introduction

Jenn C Chow is a prominent inventor based in San Jose, California. She has made significant contributions to the field of semiconductor processing, holding a total of five patents. Her work focuses on improving cleaning systems and surface texturization methods for semiconductor components.

Latest Patents

One of her latest patents is an integrated semiconductor part cleaning system. This invention relates to chamber component cleaning systems and methods for cleaning a chamber component. The system includes a spray station, a first cleaning station, a dry station, a component transfer mechanism, and enclosures that house these components. The spray station features a holder to position a chamber component in the path of a cleaning spray, along with a movable nozzle that provides the cleaning spray at a specified pressure. The first cleaning station utilizes a push mechanism to force cleaning fluid through features and holes of the chamber component, complemented by a movable transducer that delivers ultrasonic energy.

Another notable patent is for texturizing a surface without bead blasting. This system provides a texture to a component's surface for use in a semiconductor processing chamber. It includes an enclosure with a processing region, a support, a photon light source, an optical module, and a lens. The optical module features a beam modulator and a beam scanner to create and distribute a beam of photons across the component's surface, forming various features.

Career Highlights

Jenn has worked with leading companies in the semiconductor industry, including Applied Materials, Inc. and Contour Semiconductor, Inc. Her experience in these organizations has allowed her to develop innovative solutions that enhance semiconductor processing.

Collaborations

Throughout her career, Jenn has collaborated with notable professionals, including David Walter Groechel and Tuochuan Huang. These partnerships have contributed to her success and the advancement of her inventions.

Conclusion

Jenn C Chow is a trailblazer in semiconductor innovation, with a focus on cleaning systems and surface texturization. Her patents reflect her commitment to advancing technology in this critical field.