Company Filing History:
Years Active: 2003
Title: Jeng-Fieng Lu: Innovator in Semiconductor Process Monitoring
Introduction
Jeng-Fieng Lu is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the area of process monitoring. His innovative approach addresses critical challenges in maintaining the integrity of semiconductor processes.
Latest Patents
Jeng-Fieng Lu holds a patent for a method titled "Method for monitoring contaminating particles in a chamber." This invention provides a systematic approach to determine the number of contaminating particles in a process chamber. While it is particularly effective for detecting particles in a metal etch chamber, the method can be applied to various semiconductor process chambers facing particle contamination issues. The process involves conducting at least two particle dislodging cycles, utilizing process gases such as Cl, BCl, and Ar, to ensure accurate monitoring of particle levels.
Career Highlights
Jeng-Fieng Lu is associated with Taiwan Semiconductor Manufacturing Company Limited, a leading entity in the semiconductor industry. His work has been instrumental in enhancing the efficiency and reliability of semiconductor manufacturing processes. With a focus on innovation, he continues to contribute to advancements in the field.
Collaborations
Jeng-Fieng Lu has collaborated with esteemed colleagues, including Horng-Wen Chen and Chiang-Jen Peng. Their combined expertise has fostered a collaborative environment that promotes innovation and problem-solving in semiconductor technology.
Conclusion
Jeng-Fieng Lu's contributions to semiconductor process monitoring exemplify the importance of innovation in technology. His patented method for monitoring contaminating particles showcases his commitment to improving manufacturing processes. Through his work, he continues to influence the semiconductor industry positively.