Jen-Shiang Fang

Title: Innovations of Jen-Shiang Fang in Semiconductor Technology

Introduction

Jen-Shiang Fang is a notable inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of photoresist stripping processes. His innovative approach has led to the development of a unique apparatus that enhances the efficiency of semiconductor manufacturing.

Latest Patents

Jen-Shiang Fang holds a patent for a "Photoresist stripper using nitrogen bubbler." This invention provides a process and apparatus characterized by a gas distribution plate. The gas supply manifold directs gas bubbles from the bottom of a process tank upward and between wafers contained in a cassette. This improved method effectively strips photoresist from larger semiconductor wafers that have dense top conductive patterns with protuberant sidewalls. The method ensures a scrubbing action that is parallel to the device array being formed on the wafer's surface.

Career Highlights

Fang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate and contribute to advancements in semiconductor technology. His work has been instrumental in improving manufacturing processes and enhancing product quality.

Collaborations

Throughout his career, Jen-Shiang Fang has collaborated with esteemed colleagues such as Chie-Chi Chen and Wen-Hsiang Tseng. These collaborations have fostered a productive environment for innovation and have led to further advancements in their field.

Conclusion

Jen-Shiang Fang's contributions to semiconductor technology through his innovative patent demonstrate his expertise and commitment to advancing the industry. His work continues to impact the efficiency of semiconductor manufacturing processes.