Company Filing History:
Years Active: 2003-2010
Title: Innovations of Jeffrey A Schefske
Introduction
Jeffrey A Schefske is a notable inventor based in San Jose, CA. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work primarily focuses on advancements in immersion lithography processes, which are crucial for the fabrication of semiconductor devices.
Latest Patents
One of his latest patents is titled "Method for removal of immersion lithography medium in immersion lithography processes." This patent describes a process for fabricating a semiconductor device that includes applying an immersion lithography medium to a semiconductor wafer's surface, exposing it to electromagnetic radiation, and using supercritical carbon dioxide to remove the immersion medium. This innovative approach also includes the recovery of the immersion lithography medium.
Another significant patent is "Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systems." This invention outlines a method for operating an immersion lithography system, which involves immersing a wafer in an immersion medium containing bubbles. The method utilizes ultrasonic waves to disrupt the bubbles, allowing for effective exposure of the wafer with an exposure pattern.
Career Highlights
Jeffrey A Schefske is currently employed at Advanced Micro Devices Corporation, a leading company in the semiconductor industry. His work at AMD has allowed him to contribute to cutting-edge technologies that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Throughout his career, Schefske has collaborated with notable colleagues, including Harry Jay Levinson and Adam R Pawloski. These collaborations have fostered an environment of innovation and have led to the development of advanced technologies in the field.
Conclusion
Jeffrey A Schefske's contributions to semiconductor technology through his patents and work at Advanced Micro Devices Corporation highlight his role as a key innovator in the industry. His inventions continue to influence the future of semiconductor manufacturing processes.
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