This inventor holds 1 USPTO granted patent. Top assignee: Entegris, Inc.. Active years: 2006.
Company Filing History:
Years Active: 2006
Title: Jeff Halperin: Innovator in Reactive Gas Filtration
Introduction
Jeff Halperin is an accomplished inventor based in Arlington, MA (US). He has made significant contributions to the field of semiconductor processing through his innovative work on gas filtration technologies. His expertise and dedication to improving semiconductor processes have led to the development of a unique patent that addresses critical challenges in the industry.
Latest Patents
Halperin holds a patent for a Reactive Gas Filter. This invention provides a gas filter specifically designed for reactive gases used in semiconductor processing tools and processes that are sensitive to molecular contamination. The reactive gas filter boasts improved pressure drop characteristics and can deliver an output gas stream with concentrations of less than about 1 ppbv for both ammonia and sulfur dioxide. This is achieved for input gas streams with ammonia and sulfur dioxide concentrations of no greater than about 10 ppbv and 5 ppbv, respectively, using a filter media volume of no greater than about 0.5 liters.
Career Highlights
Jeff Halperin is currently employed at Entegris, Inc., where he continues to advance his work in gas filtration technologies. His innovative approach has positioned him as a key player in the semiconductor industry, contributing to the development of solutions that enhance the efficiency and reliability of semiconductor manufacturing processes.
Collaborations
Halperin has collaborated with notable colleagues, including David Ruede and Carly Shellhammer. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas within the field.
Conclusion
In summary, Jeff Halperin is a notable inventor whose work on reactive gas filtration has made a significant impact on semiconductor processing. His patent and ongoing contributions to Entegris, Inc. highlight his commitment to innovation in this critical industry.